Very compact large-membrane sensors can be used as an alternative to ion chambers, reducing the sensor footprint by up to ×10.
Ultra-compact XBPM (see Fig. 1 below) are also available upon request.
| Sensor thickness | Active region | Transparent region | Minimal op. bias | Max op. bias |
|---|---|---|---|---|
| <1 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| <1 µm | 10 mm × 5 mm | 3 mm Ø | 0 V | 10 V |
| 1 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| 1 µm | 10 mm × 10 mm | 4 mm × 2 mm | 0 V | 10 V |
| 2 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| 2 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 10 V |
| 2 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 10 V |
| 10 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 30 V |
| 10 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 30 V |
| 10 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 30 V |
| 20 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 70 V |
| 20 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 70 V |
| 20 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 70 V |
Tab. 1 – Price tag for different I0 sensors.
Fig.1 Installed intensity monitor at microXAS
Fig.2 Demonstration of compact 2um, 4mmx4mm, XBPM for nanofocusing applications