SiC-Integrated X-ray Optics for In-Situ Beam Diagnostics SiC-integrated Order-Sorting Apertures and Center Stops for in-situ monitoring of X-ray beam intensity and position, already validated in synchrotron experiments. View case study
Ultra-Thin SiC Membranes for Soft X-ray Beam Monitoring Ultra-thin (<1um) Silicon Carbide free-standing membranes for beam intensity and position monitors of soft X-ray beamlines View case study