Product description and specifications: Silicon Carbide XBPM sensors are composed of diodes in 2×2 array configurations, with gaps of ~6 µm, large active areas and a central region with defined high transparencies. XBPMs are typically supplied together with 3×4 cm² aluminum-core circuit boards for easy connection. Mounted sensors are air- as well as UHV- (10⁻⁸ mbar) compatible. Mounted sensors are also available with metal covers to avoid damage to the sensor surface during handling and installation. All sensors can be operated at zero bias with >80% Charge Collection Efficiency (CCE).
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| Sensor thickness | Active region | Transparent region | Minimal op. bias | Max op. bias |
|---|---|---|---|---|
| <1 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| <1 µm | 10 mm × 5 mm | 3 mm Ø | 0 V | 10 V |
| 1 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| 1 µm | 10 mm × 10 mm | 4 mm × 2 mm | 0 V | 10 V |
| 2 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 10 V |
| 2 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 10 V |
| 2 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 10 V |
| 10 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 30 V |
| 10 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 30 V |
| 10 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 30 V |
| 20 µm | 5 mm × 5 mm | 2 mm Ø | 0 V | 70 V |
| 20 µm | 10 mm × 5 mm | 4 mm × 2 mm | 0 V | 70 V |
| 20 µm | 10 mm × 10 mm | 4 mm × 4 mm | 0 V | 70 V |
Tab. 1 – Price tag for different XBPM sensors; other geometries available upon request.
Fig.2 Left) SiC device with gen1 layout assembled on a 4x3cm2 PCB. Electrical connections for the 2×2 sensors array can be seen from front view whereas the 9x3mm2 free-standing thin membrane can be seen from back view. Right) SiC device with gen2 layout assembled on a 4x3cm2 PCB. Electrical connections for the 2×2 sensors array can be seen from front view whereas the 2mm2 free-standing thin circular membrane can be seen from back view.
Fig.3 20μm SiC wafer showing all different devices: intensity, position and profile monitors with different geometries
Fig.4 Measuring system used at Diamond ltd to compare 1-1 single crystal diamond and SiC XBPM (presented at IBIC2021) conference, published here)